Equipment

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  1. Clean booth

  2. Semiconductor analyzer Keithley 4200A with CVU

  3. Vertical tapping machine

  4. Keithley 3706A systems switch multimeter

  5. Thermal oven

  6. Ultrasonicator

  7. Gas Chromatography (GC) with head space

  8. Shaker

  9. Photolithography

  10. RT66C Ferroelectric tester

  11. ICP Reactive ion etcher

  12. RO/DI water purifier

  13. Thermal evaporator

  14. PB100 4 probe measurement

  15. Centrifuge Centurion [CR4000 (BRK5206)]

  16. Tip Ultrasonicator

  17. Hot press

  18. 가스센서 측정장치 (Gas sensor test setup)

  19. Thermal CVD

  20. Mid Power Battery Cycler (배터리 충방전시험장치)

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